Probe the 4th Industrial Revolution.
It’s SOULBRAINSLD.
SOULBRAINSLD MEMS Div.
Item | Specification | Remark (12” FWC) | |
---|---|---|---|
Tip Size | Under 12㎛ | Meet customer requirement | |
Tip Height | 175㎛ | ||
Scrub mark length | 15㎛ ± 30% at OD 75㎛ | KOZ 5㎛ | |
Path Resistance | Power / GND | 1Ω | Current source: 50mA |
Signal | 10Ω | ||
Leakage | 10nA (5V) | ProbeWorx or equivalent | |
X , Y Alignment | ± 12㎛ | ||
Planarity | ≤ 30㎛ | ||
Operating Chuck Temperature | - 40℃, 125℃ |
Tip position offset is applied to each operating temperature option. |
|
Max Overdrive | 120㎛ |
3D MEMS
probe 사용
정확한 probe
position 구현
Pad내부 IC 구조에
damage를 주지
않기 위한 Low
probe force 설계
Ultra high
channel sharing 기술
적용
DUT 증가에
따른 핀수 증가
폭넓은 온도 대응
(저온 -40도,
고온 125도)
저전압
전원 테스트