Probe the 4th Industrial Revolution.
It’s SOULBRAINSLD.
SOULBRAINSLD MEMS Div.
Item | Specification | Remark (12” FWC) | |
---|---|---|---|
Tip Size | Under 12㎛ | Meet customer requirement | |
Tip Height | 175㎛ | ||
Scrub mark length | 15㎛ ± 30% at OD 75㎛ | KOZ 5㎛ | |
Path Resistance | Power / GND | 1Ω | Current source: 50mA |
Signal | 10Ω | ||
Leakage | 10nA (5V) | ProbeWorx or equivalent | |
X , Y Alignment | ± 12㎛ | ||
Planarity | ≤ 30㎛ | ||
Operating Chuck Temperature | - 40℃, 125℃ |
Tip position offset is applied to each operating temperature option. |
|
Max Overdrive | 120㎛ |
Use 3D MEMS probes
Implement accurate probe tip position
Design low probe force in order not to damage the IC structure inside the pad
Apply ultra high channel sharing technology
Pin counts increase according to DUT increase
Meet wide temperature range (-40, 125C)
Low voltage power test